Photolithography Photomasks and Reticles Photolithography Photomasks and Reticles Photolithography Photomasks and Reticles Photolithography Photomasks and Reticles Photolithography Patterning Silicon Manufacturing Oxidation of Silicon SiO2 growth is a key process step in manufacturing all Si devices Thick ( 1µm) oxides are used for field oxides ( ...